[09-05] Byung Joon Choi, Seung-Hwan Oh, Seol Choi, Taeyong Eom, Yong Cheol Shin, Kyung Min Kim, Cheol Seong Hwang, Yoon Jung Kim, Hae Chan Park, Tae Sun Baek and Suk Kyoung Hong, "Switching Power Reduction in Phase Change ... [BibTeX] [PDF]
[ABSTRACT] Phase change memory cells were fabricated using plasma-enhanced cyclic chemical-vapor-deposited Ge2Sb2Te5 GST thin films
deposited on 300 nm diameter TiN/W contact plugs formed in a SiO2 layer. A 2, 4, and 8 nm thick atomic deposited TiO2 layer
was interposed between the GST and underlayer containing the c ...